Title:
【発明の名称】厚さ測定装置
Document Type and Number:
Japanese Patent JP2577456
Kind Code:
B2
Inventors:
HIRAGA TATSU
Application Number:
JP24250188A
Publication Date:
January 29, 1997
Filing Date:
September 29, 1988
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01B15/02; (IPC1-7): G01B15/02
Domestic Patent References:
| JP6063406A | ||||
| JP5934106A | ||||
| JP55107911A |
Attorney, Agent or Firm:
Yasuo Miyoshi (1 outside)