Title:
【考案の名称】半導体装置用空気作動式ブロックバルブ
Document Type and Number:
Japanese Patent JP2581197
Kind Code:
Y2
Inventors:
Shigeru Yagisawa
Application Number:
JP561095U
Publication Date:
September 21, 1998
Filing Date:
May 17, 1995
Export Citation:
Assignee:
Toyoko Chemical Co., Ltd.
International Classes:
F16K31/12; F16K31/126; F16L39/04; H01L21/205; (IPC1-7): F16K31/126; F16L39/04; H01L21/205
Domestic Patent References:
| JP471726U | ||||
| JP56129659U | ||||
| JP442913Y2 |
Attorney, Agent or Firm:
Hitoshi Inagaki