Title:
【発明の名称】真空成膜装置
Document Type and Number:
Japanese Patent JP3007702
Kind Code:
B2
Inventors:
Akira Matsuno
Takashi Nire
Takashi Nire
Application Number:
JP1826991A
Publication Date:
February 07, 2000
Filing Date:
January 18, 1991
Export Citation:
Assignee:
KOMATSU LTD.
International Classes:
C23C14/24; (IPC1-7): C23C14/24
Domestic Patent References:
| JP1301854A |
Attorney, Agent or Firm:
Yoshihiko Hashizume