【発明の名称】高真空排気制御装置

Title:

【発明の名称】高真空排気制御装置

Document Type and Number:

Japanese Patent JP2503234

Kind Code:

B2

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Inventors:

HIRANO HARUO
YOSHIMURA NAGAMITSU
AOKI YOSHINORI

Application Number:

JP20586087A

Publication Date:

June 05, 1996

Filing Date:

August 19, 1987

Export Citation:

Assignee:

NIPPON ELECTRON OPTICS LAB

International Classes:

F04B37/16; (IPC1-7): F04B37/16

Domestic Patent References:

Previous Patent: JP2503233

Next Patent: JPH02503235