Title:
【考案の名称】回転割り出し装置
Document Type and Number:
Japanese Patent JPH0615956
Kind Code:
U
Inventors:
Hiroshi Nagai
Ryozaburo Miwa
Ryozaburo Miwa
Application Number:
JP5834192U
Publication Date:
March 01, 1994
Filing Date:
July 28, 1992
Export Citation:
Assignee:
Rosef Technology Co., Ltd.
International Classes:
B23P19/00; B23Q1/00; B23Q1/48; B23Q1/66; B23Q39/04; H05K13/02; (IPC1-7): B23Q39/04; B23P19/00; B23Q1/14; H05K13/02
Attorney, Agent or Firm:
Kunio Nakagawa
Next Patent: 回転割出式ウエーハ面取部研磨装置