Title:
IDENTIFICATION OF CASSETTES
Document Type and Number:
Japanese Patent JPH0613453
Kind Code:
A
Abstract:
PURPOSE: To provide a method for identifying rapidly many kinds of cassettes housing semiconductor wafers which are carried between processes.
CONSTITUTION: This is a method for identifying cassettes. By processing a group of holes 3 which constitute an identification code by a binary coded decimal notation in a flange 2 of a cassette 1, many kinds of cassettes can be identified. On the other hand, by burying a recognition sensor 6 in an arm 5 of a carrier 4 which handles the cassette 1, the identification code can be read rapidly when handling the cassette 1 with the arm 5.
Inventors:
KAYANO TOMOO
Application Number:
JP16968992A
Publication Date:
January 21, 1994
Filing Date:
June 26, 1992
Export Citation:
Assignee:
KAWASAKI STEEL CO
International Classes:
H01L21/677; H01L21/673; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Eiichi Kobayashi