THIN FILM TRANSISTOR

Title:

THIN FILM TRANSISTOR

Document Type and Number:

Japanese Patent JPH0548097

Kind Code:

A

Abstract:

PURPOSE: To provide a thin film transistor which realizes a large size display screen and high definition display of a display apparatus through cost reduction by improving a method of forming Ta which is mainly used as the electrode wiring material.

CONSTITUTION: A gate electrode 2 of TFT 15 to be provided on a glass substrate 1 is formed in a double-layer structure where a second Ta layer not mixing N2 is laminated on a first Ta layer 4 mixing N2.

Inventors:

GOTO MASAHITO
SHIMADA YASUNORI
MORIMOTO HIROSHI

Application Number:

JP20292591A

Publication Date:

February 26, 1993

Filing Date:

August 13, 1991

Export Citation:

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Assignee:

SHARP KK

International Classes:

G02F1/1343; G02F1/136; G02F1/1368; H01L21/28; H01L27/12; H01L29/40; H01L29/43; H01L29/78; H01L29/786; (IPC1-7): G02F1/1343; G02F1/136; H01L27/12; H01L29/40; H01L29/46; H01L29/784

Domestic Patent References:

JPH0352264A	1991-03-06
JPH03141673A	1991-06-17

Attorney, Agent or Firm:

Shusaku Yamamoto

Next Patent: センサの異常監視装置