Title:
【発明の名称】ピエゾバイモルフ素子の製造方法
Document Type and Number:
Japanese Patent JP2527435
Kind Code:
B2
Abstract:
PURPOSE:To accurately cut an element base material and make the characteristics of an element uniform by providing a plurality of openings for forming the protrusions of the electrodes at an electrode member, laminating piezo members, and cutting them. CONSTITUTION:A plurality of openings 14a of triangular shape are formed at a predetermined pitch on an end region for forming the protrusion of an intermediate electrode base material 14, an upper piezo member 13, an intermediate electrode base material 14 and a lower piezo member 15 are laminated through an adhesive, and secured to form a piezo bimorph element base material 16. Then, the protruding end region of the material 14 is cut along the line D-D', and the material 16 is cut along the line C-C' passing the opening 14a to obtain a plurality of piezo bimorph element 1.
Inventors:
Hirohiko Katayama
Yasuko Miyazaki
Yasuhiro Yamada
Matsuoka Mikiharu
Takashi Kanemoto
Yasuko Miyazaki
Yasuhiro Yamada
Matsuoka Mikiharu
Takashi Kanemoto
Application Number:
JP7754887A
Publication Date:
August 21, 1996
Filing Date:
April 01, 1987
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L41/09; H01H35/00; H01L41/08; (IPC1-7): H01L41/09; H01H35/00
Domestic Patent References:
| JP55120187A | ||||
| JP63115389A |
Attorney, Agent or Firm:
Kato Taku