Title:
【発明の名称】プラズマ発生装置及び精確に制御されたプラズマを発生させる方法
Document Type and Number:
Japanese Patent JP2550073
Kind Code:
B2
Abstract:
A plasma generating system comprises a plasma gun (10) including a hollow cylindrical anode member (24D), a hollow cylindrical intermediate member (26) electrically isolated from and juxtaposed coaxially with the anode member to form a plasma-forming gas passage (28) through the intermediate member and the anode member, and an axially movable cathode member (20). The intermediate member comprises tubular segments (24A-C) separated by resilient insulating spacing rings (30A-C) held in compression. Arc radiation is blocked from the spacer rings by meanders (90) in the inter-segment slots and further by ceramic barrier rings. An electric motor or pneumatic piston responsive to a measurement of arc voltage continually adjusts the axial position of the cathode tip relative to the anode nozzle (14) so as to maintain a predetermined arc voltage.
Inventors:
TOOMASU EFU BERUNETSUKI
KEUIN JEE UAAREI
UIRIAMU PII RATSUSHU
JON EFU KURAIN
CHANDORA BUHANSARI
JANUSU URODAATSUITSUKU
KEUIN JEE UAAREI
UIRIAMU PII RATSUSHU
JON EFU KURAIN
CHANDORA BUHANSARI
JANUSU URODAATSUITSUKU
Application Number:
JP14543587A
Publication Date:
October 30, 1996
Filing Date:
June 12, 1987
Export Citation:
Assignee:
PERKIN ELMER CORP
International Classes:
C23C4/12; H05H1/34; H05H1/36; H05H1/42; (IPC1-7): H05H1/42; C23C4/12
Domestic Patent References:
| JP5064144A | ||||
| JP3711415B1 | ||||
| JP4217714Y1 |
Other References:
【文献】米国特許3953705(US,A)
Attorney, Agent or Firm:
Toshio Yano