Title:
【考案の名称】研磨装置の揺動駆動機構
Document Type and Number:
Japanese Patent JPH0537452
Kind Code:
U
Inventors:
Kai Nobuto
Application Number:
JP8781091U
Publication Date:
May 21, 1993
Filing Date:
October 25, 1991
Export Citation:
Assignee:
RYOBI CORPORATION
International Classes:
B24B23/04; B24B55/10; B24D9/08; (IPC1-7): B24B23/04; B24B55/10; B24D9/08
Attorney, Agent or Firm:
Yasuo Ishikawa (1 outside)
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