Title:
IC TEST JIG
Document Type and Number:
Japanese Patent JPH063408
Kind Code:
A
Abstract:
PURPOSE: To provide a jig which allows switching supplement of coolant as required.
CONSTITUTION: An IC 6 is set in a specified test position, and an IC locking means 3 for fixing it is provided in a manner movable in the axial direction. When the IC locking means 3 is so set as to lack the IC 6, a coolant circulation channel A is released to allow coolant to flow into the IC 6 side, meanwhile, if the IC locking means 3 is set above, away from, the IC 6, a coolant bypass B is released to stop supplement of coolant to the IC 6 side.
Inventors:
MAEDA KANAKO
AKASHI YASUHIRO
AKASHI YASUHIRO
Application Number:
JP18870292A
Publication Date:
January 11, 1994
Filing Date:
June 23, 1992
Export Citation:
Assignee:
NEC CORP
NIPPON ELECTRIC ENG
NIPPON ELECTRIC ENG
International Classes:
H01L21/66; H01L23/473; G01R31/26; (IPC1-7): G01R31/26; H01L21/66; H01L23/473
Attorney, Agent or Firm:
Takahashi Isamu