Title:
MATRIX TYPE DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP3031056
Kind Code:
B2
Abstract:
PURPOSE: To improve the insulation characteristics and display quality of a thin film transistor(TFT) LCD in a small number of processes by improving the constitution a gate insulating film and an insulating film for electric charge holding capacitance.
CONSTITUTION: At least the gate insulating films 5a and 6 or insulating films 4 and 5b for electric charge holding capacitance of a thin film transistor are formed of insulating films composed of ≥2 layers; and at least one layer of each insulating film is formed of the same material as a common-use insulating film 5 and other insulating films of plural layers are formed of gate insulating films and/or dedicated insulating films 4 and 6 matching insulating films electric charge storage capacitance.
Inventors:
Naoki Nakagawa
Hironori Aoki
Go Ohashi
Hironori Aoki
Go Ohashi
Application Number:
JP11472192A
Publication Date:
April 10, 2000
Filing Date:
May 07, 1992
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02F1/133; G02F1/136; G02F1/1365; G02F1/1368; G09F9/30; H01L21/336; H01L27/12; H01L29/78; H01L29/786; (IPC1-7): G02F1/1365; G09F9/30; H01L21/336; H01L27/12; H01L29/786
Domestic Patent References:
| JP6097385A | ||||
| JP4128823A |
Attorney, Agent or Firm:
Kaneo Miyata (2 outside)