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Title:
NANO-LEVEL STRUCTURE OBSERVATION DEVICE
Document Type and Number:
Japanese Patent JP2006261006
Kind Code:
A
Abstract:

To provide a nano-level structure observation device preventing generation of measurement error caused by reflection of laser beam.

A black light absorption body 5 is arranged at least at one part of inside of an observation chamber 1 constituting the nano-level structural composition observation device for observing a nano-level structural composition of a needle-shape sample 4 by releasing a single atom or a cluster consisting of plural elements at a time into a space at least by external energy 3.


Inventors:
GOTO YASUYUKI
FUKUDA MASAHIRO
Application Number:
JP2005078790A
Publication Date:
September 28, 2006
Filing Date:
March 18, 2005
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01J49/40; H01J49/16; G01N27/64
Domestic Patent References:
JP2002042715A2002-02-08
JP2001208659A2001-08-03
JPH0743373A1995-02-14
JPH03114130A1991-05-15
JPH11111208A1999-04-23
JPH05118458A1993-05-14
JP2661983B21997-10-08
Foreign References:
WO2002093615A12002-11-21
WO2002067288A12002-08-29
Attorney, Agent or Firm:
Manabe Kiyoshi
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito



 
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