Title:
NANO-POROUS THIN FILM AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2012246162
Kind Code:
A
Abstract:
To provide a nano-porous thin film, wherein disposition of nano-space having different sizes is optionally controlled in a film thickness direction, and to provide a method for producing the same.
The nano-porous thin film having nano-porous structure includes a plurality of layer regions along the film thickness direction. The plurality of layer regions include a first layer region having a first pore and a second layer region having a second pore, wherein the first pore and the second pore penetrate each other, and the sizes of space between of the first pore and the second pore are different.
Inventors:
ITO YOSHINORI
Application Number:
JP2011117956A
Publication Date:
December 13, 2012
Filing Date:
May 26, 2011
Export Citation:
Assignee:
CANON KK
International Classes:
C01B37/00; B01J21/06; B01J23/52; B01J32/00; B01J35/10; B32B5/18; B82Y30/00; B82Y40/00; C01G23/04
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Masami Saito
Katsuhiko Kimura
▲濱▼口 岳久
Koji Yoshizawa
Naofumi Tanaka
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Masami Saito
Katsuhiko Kimura
▲濱▼口 岳久
Koji Yoshizawa
Naofumi Tanaka
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