Title:
NANOIMPRINTING CURABLE COMPOSITION AND PATTERN FORMING METHOD
Document Type and Number:
Japanese Patent JP2010000612
Kind Code:
A
Abstract:
To provide a nanoimprinting curable composition which is suitable for spin or slit coating, enables formation of a microscopic pattern, achieves high adhesiveness to a substrate after photocuring and facilitates peeling of a resist.
The nanoimprinting curable composition contains at least 87 mass% of a monofunctional polymerizable compound and a photopolymerization initiator.
Inventors:
TAKAYANAGI TAKASHI
FUJITA AKINORI
FUJITA AKINORI
Application Number:
JP2008159203A
Publication Date:
January 07, 2010
Filing Date:
June 18, 2008
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
B29C59/02; C08F2/44; C08F220/12; C08F220/56; C08F226/00
Domestic Patent References:
| JP2008084984A | 2008-04-10 | |||
| JP2008105414A | 2008-05-08 |
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes
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