Title:
ナノ粒子コーティング装置
Document Type and Number:
Japanese Patent JP6691911
Kind Code:
B2
Abstract:
The present invention provides an apparatus for forming a uniform, large scale nanoparticle coating on a substrate. The apparatus comprises a source of vaporised metal nanoparticles. The apparatus further comprises a first plate (20) providing an array of spaced apart first apertures (22). The apparatus further comprises a second plate (24) aligned with and spaced apart from the first plate (20). The second plate (24) provides an array of spaced apart second apertures 26. Each second aperture (26) of the second plate (24) is aligned with a first aperture (22) of the first plate (20).
Inventors:
Kinmont, Patrick William John
Vince, robert davidson
Vince, christopher robin
Vince, robert davidson
Vince, christopher robin
Application Number:
JP2017515984A
Publication Date:
May 13, 2020
Filing Date:
September 24, 2015
Export Citation:
Assignee:
NANO RESOURCES LIMITED
International Classes:
C23C14/24; B82Y30/00; B82Y40/00
Domestic Patent References:
JP2006117527A | ||||
JP2013524009A | ||||
JP2004137583A | ||||
JP2013241683A | ||||
JP2010174271A | ||||
JP2013049911A |
Foreign References:
US20120164776 |
Attorney, Agent or Firm:
Kiwa Patent Office