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Title:
NANOSTRUCTURE AND METHOD FOR PRODUCING NANOSTRUCTURE
Document Type and Number:
Japanese Patent JP2007098563
Kind Code:
A
Abstract:

To provide a method for obtaining a nanostructure by an inexpensive and simple device which can control fine pores and cell diameter and is applicable for a substrate having a large area, and a method for obtaining a metal nanostructure by using the nanostructure as a template, and the metal nanostructure.

The method for obtaining the metal nanostructure 4 employs a porous oxide film nanostructure 1 as the template, which is composed of alumina film 3 obtained by anodizing a substrate 2 such as aluminum or the like and expanding the pore diameter by a fine pore expansion treatment. The method comprises a step, in which metal ions M3 are carried on the template by immersing the template in a solution containing ions of the metal M3 having lower oxidation-reduction potential than the metal M2 while applying an ultrasonic wave, a step, in which a colloid of the metal M2 is carried on the template by immersing the template carrying on the metal ions M3 in the solution containing the ions of the metal M2 while applying the ultrasonic, an electroless plating step, in which the template carrying the colloid of the metal M2 is immersed in the solution containing the ions of metal M1, a reducing agent, and a smoothing agent, and a step of selectively removing an oxide film 3 by etching.


Inventors:
SHO SHOCHIKU
MORI MASASHI
KAWAMURA HIROTAKA
Application Number:
JP2006063410A
Publication Date:
April 19, 2007
Filing Date:
March 08, 2006
Export Citation:
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Assignee:
CENTRAL RES INST ELECT
International Classes:
B01J23/44; B82B3/00; B01J35/10; B82B1/00; C01B3/00; C23C18/18; C23C18/31; C25B11/03; C25D11/04; C25D11/26; H01L21/027
Domestic Patent References:
JP2004217961A2004-08-05
JPH08264700A1996-10-11
JP2000192283A2000-07-11
JP2001254182A2001-09-18
JP2002332578A2002-11-22
JP2001105400A2001-04-17
JPS61106796A1986-05-24
Attorney, Agent or Firm:
Kazumi Murase



 
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