Title:
NARROW-BAND LASER DEVICE
Document Type and Number:
Japanese Patent JP3837356
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To control high with accuracy and stability the wavelength of laser light at a high speed.
SOLUTION: In the narrowbanded laser device, which is provided with prisms 18, 19 and 20, a grating 16 and a mirror holder 26 for holding a mirror for wavelength selection, for selecting a wavelength by changing the angle of the mirror holder 26 to a plate, while including these components in a casing 77 of a narrowbanded element, the plate is integrated with the casing 77 of the narrowbanded element.
Inventors:
Wakabayashi Osamu
Satoshi Kobayashi
Masahiko Kowaka
Satoshi Kobayashi
Masahiko Kowaka
Application Number:
JP2002099355A
Publication Date:
October 25, 2006
Filing Date:
April 02, 1992
Export Citation:
Assignee:
KOMATSU LTD.
International Classes:
G03F7/20; H01S3/105; H01L21/027; H01S3/1055; (IPC1-7): H01S3/1055; G03F7/20; H01L21/027
Other References:
特開平2-307285号公報
特開平1-123238号公報
特開平1-123238号公報
Attorney, Agent or Firm:
Takahisa Kimura
Previous Patent: SLOPE DETECTING DEVICE
Next Patent: ELECTRONIC PEN DATA INPUT DEVICE FOR COMPUTER, AND COORDINATE MEASURING METHOD
Next Patent: ELECTRONIC PEN DATA INPUT DEVICE FOR COMPUTER, AND COORDINATE MEASURING METHOD