PURPOSE: To obtain a large displacement and a strong force with a simple structure by opposing, at a narrow interval, comb structure ends of stationary electrodes to comb structure ends of a moving portion formed on both sides.

CONSTITUTION: Both side ends of a moving portion 1 made of silicon, etc., are formed into comb structure ends 2, and comb structure ends 4 of stationary electrodes 3 made of glass, etc., are opposed to the respective comb structure ends 2. A parallel spring 5 made of silicon, etc., and a glass substrate 6 are provided for the moving portion 1 and the stationary electrodes 3, and connection terminal portions 7 that are connected to the comb structure ends 4 are provided on the stationary electrodes 3. The moving portion 1 is displaced when a voltage is applied. A stronger force can be output by increasing the number of comb teeth. The parallel spring 5 supports the electrodes 3 elastically, and provides a larger anisotropy of compliance. The glass substrates 6 serves to reduce the parasitic capacitance and increase the breakdown voltage.