Title:
MASS SPECTROGRAPH FOR LASER IONIZED NEUTRAL PARTICLE
Document Type and Number:
Japanese Patent JP3188925
Kind Code:
B2
Abstract:
PURPOSE: To reduce the detected quantity of secondary ions and perform mass spectrometry having a good quantification property at high sensitivity by providing a potential difference control means between a sample base and an ion extracting means, and providing an ion detection control means.
CONSTITUTION: When a generation section 22 outputs the pulse signal 23, a laser generation section 9 outputs the pulse laser 10 after a prescribed period. Generated ions are made light-excited ions 11 by the laser 10 and secondary ions 8 generated continuously. A potential difference controller 24 sets the potential difference E1 between an extracting electrode 12 and a sample base 6 in a prescribed period, e.g. in the period T1, in response to the signal 23, and it returns the potential difference to E2 after the period T1. Generated ions are extracted by the electrode 12 and guided to a mass spectrography section 13, and the secondary ions 8 reach an ion detector 14 earlier than the light-excited ions 11. A generation section 25 outputs the detection signal 20 in the period T2 in response to the signal 23, and the ions detected by the detector 14 are counted by a pulse count section 15 in the period T2.
Inventors:
Tetsuya Maruo
Yasuhiro Higashi
Yasuhiro Higashi
Application Number:
JP8785193A
Publication Date:
July 16, 2001
Filing Date:
March 24, 1993
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G01N27/62; H01J49/10; H01J49/26; (IPC1-7): H01J49/26; G01N27/62; H01J49/10
Domestic Patent References:
| JP456057A | ||||
| JP4138649A | ||||
| JP6355846A |
Attorney, Agent or Firm:
Masaki Yamakawa