Title:
ネガ型感放射線性組成物、パターン形成方法及び絶縁膜の製造方法
Document Type and Number:
Japanese Patent JP5834956
Kind Code:
B2
Inventors:
Koichi Hasegawa
Ikui Junto
Ikui Junto
Application Number:
JP2012013581A
Publication Date:
December 24, 2015
Filing Date:
January 25, 2012
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/075; G03F7/004
Domestic Patent References:
| JP2007334036A | ||||
| JP2007133185A | ||||
| JP2011123450A |
Attorney, Agent or Firm:
Hajime Amano
Fujimoto Katsune
Yoshinori Ikeda
Hiroshi Ogawa
Sanae Kato
Koji Ishida
Keiko Morita
Kazuki Kagami
Yoshiaki Negi
Takashi Shinjo
Fujimoto Katsune
Yoshinori Ikeda
Hiroshi Ogawa
Sanae Kato
Koji Ishida
Keiko Morita
Kazuki Kagami
Yoshiaki Negi
Takashi Shinjo