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Title:
NEGATIVE TYPE PHOTOSENSITIVE COMPOSITION
Document Type and Number:
Japanese Patent JPH05158239
Kind Code:
A
Abstract:

PURPOSE: To obtain the negative type photoresist composition high in sensitivity and resolution and small in fluctuation of performance due to processing conditions after exposure by incorporating a specified resin and a specified compound, etc.

CONSTITUTION: This photoresist composition comprises the water-insoluble and alkali-soluble resin A, preferably, such as novolak phenol resins, the compound B to be allowed to produce an acid by irradiation of active rays or radiation, such as known compounds and mixtures of them, the compound C having at least one group capable of cross-linking by action of an acid, and the compound D producing a base at a heating temperature of ≥50°C, preferably, ≥70°C. The compound to be selected as the compound C includes the compound reducing solubility of the novolak resin in alkali by the cross-linking reaction or polymerization reaction, such as a compound having a methylol group as a formaldehyde precursor.


Inventors:
AOSO TOSHIAKI
KOKUBO TADAYOSHI
Application Number:
JP34408591A
Publication Date:
June 25, 1993
Filing Date:
December 03, 1991
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F7/004; G03F7/027; G03F7/028; G03F7/038; H01L21/027; (IPC1-7): G03F7/004; G03F7/027; G03F7/028; G03F7/038; H01L21/027



 
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