PURPOSE: To obtain negative type patterns having a high sensitivity and high resolution by using polyamide acid ester, glycine compd., styryl compd. and naphthoquinone diazide compd. which are respectively specific as essential components.
CONSTITUTION: The polyamide acid ester expressed by formula I, the glycine compd. expressed by formula II, the styryl compd. expressed by formula III and the naphthoquinone diazide compd. are used as the essential components. In the formulas, R1 is a trivalent or quadrivalent org. group; R2 denotes a bivalent org. group; R3 denotes-R5-{-O-C-(=0)-C(R6)=CH2}p; R4 is R3 or-CH3, etc.; R5 is bivalent to hexad org. groups; R6 is H or CH3 group; 1 to n are 0 or 1; p is an integer from 1 to 5; x to z are percentages and satisfy 0<x, y<100, 0<z<80, x+y+z=100. R7 is-H,-CH3, etc.; R8 is-H<-C2H5, etc.; R9 is a prescribed arom. group.
SASHITA NOBUYUKI
YAMAMOTO MITSUHIRO
TAKEDA NAOJI
| JPH04120543A | 1992-04-21 | |||
| JPH03170549A | 1991-07-24 | |||
| JPH03210361A | 1991-09-13 | |||
| JPH03241356A | 1991-10-28 |