Title:
新規光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法
Document Type and Number:
Japanese Patent JP5083528
Kind Code:
B2
Inventors:
Yoichi Osawa
Takeshi Watanabe
Koji Hasegawa
Masaki Ohashi
Takeshi Watanabe
Koji Hasegawa
Masaki Ohashi
Application Number:
JP2007243560A
Publication Date:
November 28, 2012
Filing Date:
September 20, 2007
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/004; C07C25/02; C07C309/12; C07C381/12; C07D307/93; C07D333/46; G03F7/039; G03F7/075; H01L21/027
Domestic Patent References:
| JP2007145797A | ||||
| JP2007145803A | ||||
| JP2007145804A |
Foreign References:
| WO2006121096A1 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa