Title:
新規な重合体および感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4483405
Kind Code:
B2
Inventors:
Makoto Sugiura
Norihiko Sugie
Tsutomu Shimokawa
Norihiko Sugie
Tsutomu Shimokawa
Application Number:
JP2004148592A
Publication Date:
June 16, 2010
Filing Date:
May 19, 2004
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08F16/26; G03F7/033; G03F7/039; H01L21/027
Domestic Patent References:
| JP2004155680A | ||||
| JP2004115692A | ||||
| JP2004115454A | ||||
| JP2004138887A |
Attorney, Agent or Firm:
Toshiaki Fukuzawa