PURPOSE: To provide the subject apparatus wherein nitrogen gas containing low oxygen concentration can be supplied to a heating furnace with use of a membrane separation type nitrogen gas producer, and wherein when any leakage of the hydrogen gas is produced, residence of the hydrogen gas is eliminated and discharged hydrogen gas concentration can be restricted to very low one.
CONSTITUTION: Nitrogen gas is produced with a membrane separation type nitrogen gas producer 39 which is to separate nitrogen gas from air. The nitrogen gas is mixed with hydrogen gas and is rendered to combustion reaction to raise the purity thereof, and is further supplied to a heating furnace 31. A flow passage for the hydrogen gas is accommodated in a box 61, and gas discharged from the upper portion of the box 61 is mixed with the gas discharged from the membrane separation type nitrogen producer 39 after removal of the nitrogen gas.
TSUKAGOSHI EIJI
HIRANO TADASHI
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