Title:
NITROGEN TEMPERATURE RAISING UNIT
Document Type and Number:
Japanese Patent JP2015185568
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a nitrogen temperature raising unit capable of preventing the coagulation and deposition of a sublimable substance and capable of being easily installed in already-operating facilities.SOLUTION: There is provided a nitrogen temperature raising unit 1 including: a first cylindrical tube 12 into which nitrogen gas at room temperature supplied from a nitrogen gas supply unit 30 for dilution is introduced; a temperature raising container 11 that communicates with the first cylindrical tube and has a heating element 14 located on an axis of the inner space of the temperature raising container; and a second cylindrical tube 13 that communicates with the temperature raising container to discharge the temperature raised nitrogen gas. The nitrogen temperature raising unit is installed on a nitrogen gas supply path from the nitrogen gas supply unit to a dry vacuum pump 31.
Inventors:
UEDA MINORU
OGAWA TAKAHIRO
OGAWA TAKAHIRO
Application Number:
JP2014058174A
Publication Date:
October 22, 2015
Filing Date:
March 20, 2014
Export Citation:
Assignee:
TECHNOS KK
International Classes:
H01L21/3065; F04B37/16
Attorney, Agent or Firm:
Yuji Morisada