PURPOSE: To provide a chuck capable of holding both a plateshaped material having slight undulation of a holding object or large flexibility easily flexed when held and a plate-shaped material having rigidity such as capable of holding flatness to a certain degree.

CONSTITUTION: A non-contact chuck 1 is constituted of chucks 2, 3, and the chucks 2, 3 are formed into a slide structure in the axial direction. In a holding surface 6 of the non-contact chuck 1, a holding surface 4 of the chuck 2 and a holding surface 5 of the chuck 3 are positioned flush, to form a single non- contact chuck. In the non-contact chuck 1, an air flow is input from an air supply port 7, to jet air from a jet port 8. In this way, both a plate-shaped material of high rigidity and a plate-shaped material flexible having waviness can be held by the chuck of single kind.