Title:
Non-contact conveying machine
Document Type and Number:
Japanese Patent JP5952666
Kind Code:
B2
Inventors:
Hitoshi Iwasaka
Hideyuki Tokunaga
Katsuhiro Koshiishi
Hideyuki Tokunaga
Katsuhiro Koshiishi
Application Number:
JP2012157395A
Publication Date:
July 13, 2016
Filing Date:
July 13, 2012
Export Citation:
Assignee:
Harmotech Co., Ltd.
International Classes:
B65G49/06; H01L21/677
Domestic Patent References:
| JP2005029360A | ||||
| JP2011201696A | ||||
| JP2009256002A | ||||
| JP2010258292A | ||||
| JP2011138948A | ||||
| JP2009029591A |
Foreign References:
| WO2009119377A1 |
Attorney, Agent or Firm:
Asahi Patent Office
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