To provide an accurate non-contact determination device of the edge shape of a thin disk-like object by suppressing regular reflection.
In order to determine the edge shape in a semiconductor wafer, a plurality of light sources in forms of laser radiation sources 31, 32 each of which emits line-like light fluxes 33 are arranged so as to be coplanar in one common plane representing a measurement plane 43 in a direction perpendicular to a base surface 41 of an object 2, and turned to a common intersection point of the laser radiation sources in an edge area of the object 2 from different directions. A sheet of light is formed in the measurement plane 43, and the sheet of the light is captured with at least one base camera 35. In order to capture scattered light which is emitted from a line of light to be generated by the sheet of the light, the base camera 35 is turned to the horizontal direction to the measurement plane 43 in the base surface 41.
THOMAS BECKER
RICHTER FRANK
BERND GEY
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Hideki Imai