To provide measurement data excellent in reproducibility by arranging an object to be measured in a space in a non-contact state and relative localization with a measurement device.

The distance between an image being the mark of a portion to be measured and the measurement device is registered beforehand, the object to be measured is arranged in a prescribed space in the non-contact state, the position of a probe is adjusted so as to detect the image of the portion registered beforehand by a two-dimensional image detection means and the position of the probe is adjusted so as to turn the distance to the part to be measured by a distance measurement means to the distance registered beforehand. Further, a light beam is irradiated while changing a direction to the part to be measured from a direction decision means and the direction for maximizing the quantity of transmitted light transmitted through the part to be measured is decided. Thereafter, the portion is irradiated with measurement light from a physical quantity measurement device, output light from the part to be measured is detected and a physical quantity is obtained.