Title:
非接触支持装置
Document Type and Number:
Japanese Patent JP4607665
Kind Code:
B2
Inventors:
Hiroki Yamada
Application Number:
JP2005155302A
Publication Date:
January 05, 2011
Filing Date:
May 27, 2005
Export Citation:
Assignee:
CKD Corporation
International Classes:
H01L21/683; F16C32/06
Domestic Patent References:
| JP2004331265A | ||||
| JP2002181714A | ||||
| JP10157851A | ||||
| JP2005055207A |
Attorney, Agent or Firm:
Tsuyoshi Yamada