To inspect the surface contamination of an object to be inspected without damaging a protection film such as a base material and a paint film and without expanding a contamination site.
A non-contact surface contamination inspection device 10 or a surface-treating device supports a head unit 15 so that it can travel relatively and freely for an inspection target 11. The head unit 15 is connected to a unit box via a flexible connection means. On the other hand, the head unit 15 has a laser beam irradiation means 19 for applying laser beams for inspecting surface to the object surface of the inspection target 11, a filter-capturing means 35 for detecting a bloom that left the object surface, and a bloom detection means 31 for detecting the captured bloom. In this case, a signal that is detected by the bloom detection means 31 is processed to specify the surface contamination site of the inspection target 11 and determine a surface contamination density with a dry method without any contact.
| JPS6173054 | SMALL BOTTLE FOR ADJUSTING SAMPLE |
| JP2005512084 | Sampling equipment |
| WO/2012/007376 | METHOD FOR MEASURING PARTICLES ADHERING TO A BODY |
FUKAZAWA TAKUJI
TAMURA TOSHIYUKI
YAMAGUCHI YASUSHI
MATSUI MASAO
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