Title:
非接触表面電位測定装置、測定治具、及び非接触表面電位測定方法
Document Type and Number:
Japanese Patent JP6899559
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a non-contact surface potential measuring device, a measuring fixture, and a non-contact surface potential measuring method which can precisely measure surface potential of an object to be measured when an another voltage generation source is arranged around the object to be measured.SOLUTION: A non-contact surface potential measuring device measures surface potentials of N (N is an integer of 1 or more) voltage generation sources, being an object to be measured, in a non-contact manner, and includes: an electric field strength measuring part for measuring the electric field strength of the voltage generation sources; a storage part for storing a set of transformation coefficients for transforming each electric field strength generated by each voltage generation source into the surface potential of each voltage generation source; and a transformation part for transforming the electric field strength of the object to be measured which is measured by the electric field strength measuring part into the surface potential using the set of transformation coefficients.SELECTED DRAWING: Figure 1
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Inventors:
Mitsuru Shinagawa
Katsuyama Jun
Noriyuki Matsumoto
Katsuyama Jun
Noriyuki Matsumoto
Application Number:
JP2017061786A
Publication Date:
July 07, 2021
Filing Date:
March 27, 2017
Export Citation:
Assignee:
Hosei University
Yokogawa Electric Corporation
Yokogawa Electric Corporation
International Classes:
G01R29/12
Domestic Patent References:
| JP4032782A | ||||
| JP2003215186A | ||||
| JP200747015A | ||||
| JP200896129A | ||||
| JP11211771A | ||||
| JP2003307534A | ||||
| JP20092839A |
Foreign References:
| WO2003046587A1 |
Attorney, Agent or Firm:
Sumio Tanai
Yoshifumi Saeki
Hisanori Takahashi
Takeo Okita
Yoshifumi Saeki
Hisanori Takahashi
Takeo Okita