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Title:
NON-CONTACT SURFACE RESISTANCE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2003084020
Kind Code:
A
Abstract:

To provide a non-contact surface resistance measuring device, capable of preventing deterioration of performance or deterioration of grade of a conductive film in measuring the surface resistance, decreasing a measurement error due to temperature fluctuation, and performing continuous measurement in-line and having superior measurement accuracy.

This non-contact surface resistance measuring device is mainly composed of an eddy current generating part, an eddy current detecting part, a temperature detecting part, and a calculating means. When the detection result of the temperature detecting part deviates from the reference temperature, the calculating means obtains an increase/decrease of an eddy current due to deviation from the reference temperature, and performs correction for subtracting or adding the increase/decrease of the eddy current from and to the detection result of the eddy current detecting part, and calculates the surface resistance of the conductive film according to the corrected eddy current value.


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Inventors:
KAKITA YUJI
JINBO HIDEKI
UEDA KENJIRO
KUBOTA TAKAHIRO
Application Number:
JP2002181973A
Publication Date:
March 19, 2003
Filing Date:
June 21, 2002
Export Citation:
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Assignee:
TOYO BOSEKI
International Classes:
G01R27/02; G01N27/72; (IPC1-7): G01R27/02
Domestic Patent References:
JP2000230950A2000-08-22
JPS61120961A1986-06-09
JPH116777A1999-01-12



 
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