Title:
非接触搬送装置
Document Type and Number:
Japanese Patent JP4243766
Kind Code:
B2
Abstract:
The transport device has bodies (12,14) with a passage which is supplied by an air supply area (46). A retaining surface (40) is formed at an end of the body facing a workpiece and a circular swirl chamber (68) is provided inward by the retaining surface. A discharge opening (64) is connected with the chamfer surface (60) of the swirl chamber and swirl chamber is connected with passage in order to guide air outward into swirl chamber. A projection (54) is provided in the center of the swirl chamber and the diameter of the projection is reduced gradually towards work piece.
Inventors:
Yang Qinghai
Katsuaki Takahashi
Masayuki Hosono
Kazuo Nakano
Katsuaki Takahashi
Masayuki Hosono
Kazuo Nakano
Application Number:
JP2006270735A
Publication Date:
March 25, 2009
Filing Date:
October 02, 2006
Export Citation:
Assignee:
SMC Corporation
International Classes:
B65G7/06; B65G49/06; B65G49/07; H01L21/677
Domestic Patent References:
| JP2005051260A |
Foreign References:
| WO2005086225A1 |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Naoki Kashima
Yasuo Takubo
Toshiyuki Miyadera
Naoki Kashima
Yasuo Takubo