Title:
非接触搬送装置
Document Type and Number:
Japanese Patent JP5819859
Kind Code:
B2
Abstract:
[Problem] To provide a non-contact transfer apparatus, wherein generation of negative pressure is eliminated, amplitude of an end portion of a subject to be transferred is reduced, floating quantity of the subject is increased, and fluctuation of the floating quantity of the subject is reduced as much as possible even by opening and closing a vacuum suction port. [Solution] A non-contact transfer apparatus (4a) is configured of: an upper plate (9), which is provided with a plurality of housing hole sections and a plurality of suction holes, said housing hole sections and suction holes being alternately disposed in the longitudinal direction and the width direction; a middle plate (10), which is provided with a continuous air supply path that communicates with the housing hole sections in the upper plate, a communicating hole opened to the air supply path, and penetrating holes that communicate with the suction holes by being adjacent to the communicating hole; one air supply port connected to the communicating hole in the middle plate; a transfer rail (8), which is configured of air suction paths that communicate with the penetrating holes in the middle plate, and a lower plate (11) that is provided with vacuum suction ports connected to the air suction paths; and upward flow-forming bodies (6) attached in the housing hole sections. The air suction path formed in the lower plate is divided into two or more blocks in the longitudinal direction, and the air suction path in each block has one of the vacuum suction ports connected thereto.
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Inventors:
Hideo Ozawa
Kouichi Kakuda
Takahiro Yasuda
Toshiyuki Ikeda
Kouichi Kakuda
Takahiro Yasuda
Toshiyuki Ikeda
Application Number:
JP2012552627A
Publication Date:
November 24, 2015
Filing Date:
September 22, 2011
Export Citation:
Assignee:
OILES CORPORATION
International Classes:
B65G51/03; B65G49/06; H01L21/677
Domestic Patent References:
| JP2007027495A | 2007-02-01 | |||
| JP2004273574A | 2004-09-30 | |||
| JP2005177560A | 2005-07-07 | |||
| JP2006347719A | 2006-12-28 | |||
| JP2010254463A | 2010-11-11 | |||
| JP2010232472A | 2010-10-14 |
Foreign References:
| WO2009119377A1 | 2009-10-01 |
Attorney, Agent or Firm:
Jun Nakai