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Title:
NON-CONTACT TYPE CONVEYING DEVICE FOR SPHERICAL ARTICLE
Document Type and Number:
Japanese Patent JP11171340
Kind Code:
A
Abstract:

To provide a non-contact type conveying device for preventing spherical articles from coming into contact with a tubular inner surface, when a spherical article such as a spherical silicon-made semiconductor element is conveyed with fluid through a tubular article such as a pipe.

This non-contact type conveying device for spherical articles is provided with a spiral flow generating means for generating the spiral flow of fluid and introduces the fluid spiral flow generated by the spiral flow generating means to a passage for spherical articles. In this spiral flow generating means, a conveying passage 2 is provided in the axial direction, a rotatable rotary shaft 3 in which the spiral grooves 3b are provided on the specified parts on the outer peripheral surface, and an injection pipe 3a for connecting the conveying passage 2 and the spiral grooves 3b to each other is provided on the rotary shaft 3.


Inventors:
Sakai, Nobuo
Ishida, Ken
Application Number:
JP1997000343485
Publication Date:
June 29, 1999
Filing Date:
December 12, 1997
Export Citation:
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Assignee:
MITSUI HIGH TEC INC
International Classes:
B65G53/04; B65G51/02; H01L21/673; H01L21/677; H01L21/683; B65G53/04; B65G51/00; H01L21/67; (IPC1-7): B65G53/04; H01L21/68



 
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