Title:
非腐食性のストリッピングおよびクリーニング組成物
Document Type and Number:
Japanese Patent JP3796622
Kind Code:
B2
Abstract:
A non-corrosive photoresist stripping and cleaning composition, comprising:(a) about 5% to about 50% of a solvent;(b) about 10% to about 90% of an alkanolamine;(c) about 0.1 to 10 % of a carboxylic acid; and(d) about 1.0% to 40% of water.
Inventors:
Honda kenji
Richard Mark Morin
Gail Lynn Hansen
Richard Mark Morin
Gail Lynn Hansen
Application Number:
JP2000566353A
Publication Date:
July 12, 2006
Filing Date:
August 05, 1999
Export Citation:
Assignee:
FujiFilm Electronic Materials USA, Inc.
International Classes:
C09D9/00; G03F7/42; C11D7/26; C11D7/32; C11D7/34; C11D7/50; C11D7/60; C11D17/00; C11D17/08; C23G5/02; H01L21/027; H01L21/304; H01L21/308
Domestic Patent References:
| JP7219240A | ||||
| JP8202051A | ||||
| JP996911A |
Attorney, Agent or Firm:
Chika Takagi
Junji Yuda
Shoji Miwa
Kosuke Nishimura
Junji Yuda
Shoji Miwa
Kosuke Nishimura
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