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Title:
NON-DESTRUCTIVE INSPECTION APPARATUS OF THIN OBJECT
Document Type and Number:
Japanese Patent JP2000338056
Kind Code:
A
Abstract:

To provide the subject non-destructive inspection apparatus capable of efficiently inspecting and observing an object to be inspected in a non- destructive manner.

An non-destructive inspection apparatus of a thin object consists of a soft X-ray source 1 for generating soft X-rays, a vacuum box 9 having soft X-ray windows 11, 12 permitting soft X-rays 2 to pass provided on the inlet and outlet sides thereof, the fluorescent body 10 provided on the downstream side of the vacuum box 9 and an X-ray image processor C. An object S to be inspected is positioned between the soft X-ray window 12 on the outlet side and the fluorescent body 10 to be inspected.


Inventors:
HOSOKAWA YOSHINORI
Application Number:
JP14902099A
Publication Date:
December 08, 2000
Filing Date:
May 28, 1999
Export Citation:
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Assignee:
HORIBA LTD
International Classes:
G01N23/04; (IPC1-7): G01N23/04
Attorney, Agent or Firm:
Hideo Fujimoto