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Title:
非破壊構造解析装置、非破壊構造検査装置および非破壊構造解析方法
Document Type and Number:
Japanese Patent JP7451306
Kind Code:
B2
Abstract:
To provide a nondestructive structure analyzer that can obtain information on a measuring object at high accuracy, even under a condition that a shape and a composition of the measuring object are unknown.SOLUTION: A nondestructive structure analyzer 100 that obtains substance information of an object 5 from a result of measuring the object 5 using radiation, is equipped with: a random substance model creation section 111 for creating a random substance model in which substance information is set at random in a simulation space simulating a measurement area 10; a simulation execution section 112 for executing simulation of reproducing nondestructive inspection measurement with regard to the random substance model; a measurement value calculation section 113 for calculating an actually measured reproduction value for simulating a result of the nondestructive inspection measurement from a result of the simulation; and a predictor creation section 114 for creating a predictor in which the actually measured reproduction value is used as an explanatory variable and the substance information of the random substance model is used as a target variable, in accordance with machine learning using multiple sets of a plurality of random substance models and actually measured reproduction values corresponding to the models.SELECTED DRAWING: Figure 1

Inventors:
Sugita
Haruo Miyadera
Application Number:
JP2020094955A
Publication Date:
March 18, 2024
Filing Date:
May 29, 2020
Export Citation:
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Assignee:
Toshiba Corporation
Toshiba Energy Systems & Solutions Corporation
International Classes:
G01N23/04; G01N23/20; G06F9/455
Domestic Patent References:
JP2014044079A
JP2021081843A
JP2013231700A
JP2005114475A
JP2014523522A
JP2018036156A
JP2017044642A
Foreign References:
WO2019030449A1
WO2020002704A1
Other References:
北村 尚斗,中性子・放射光X線全散乱測定による結晶性酸化物の欠陥分布シミュレーション,粉体および粉末冶金,2017年09月,第64巻、第9号,pp. 489-494,https://www.jstage.jst.go.jp/article/jjspm/64/9/64_489/_pdf/-char/ja,DOI:https://doi.org/10.2497/jjspm.64.489
Attorney, Agent or Firm:
Sakura International Patent Office