Title:
NON-EVAPORATION TYPE GETTER MATERIAL, NON-EVAPORATION TYPE GETTER MODULE, AND NON-EVAPORATION TYPE GETTER PUMP
Document Type and Number:
Japanese Patent JP2015110214
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a non-evaporation type getter material having an improved gas adsorption rate, and a non-evaporation type getter pump having an improved exhaust rate with a reduced manufacturing cost and a reduced repair cost.SOLUTION: A non-evaporation type getter material includes network structure. A non-evaporation type getter module includes the non-evaporation type getter material. A non-evaporation type getter pump includes the non-evaporation type getter material or the non-evaporation type getter module.
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Inventors:
MASE KAZUHIKO
KIKUCHI TAKASHI
KIKUCHI TAKASHI
Application Number:
JP2014210649A
Publication Date:
June 18, 2015
Filing Date:
October 15, 2014
Export Citation:
Assignee:
HIGH ENERGY ACCELERATOR RES
International Classes:
B01J20/28; F04B37/02; F04B37/04
Domestic Patent References:
| JPH08225806A | 1996-09-03 |
Attorney, Agent or Firm:
Kenji Sugimura