Title:
非線対称荷電粒子ビームシステム
Document Type and Number:
Japanese Patent JP2008502110
Kind Code:
A
Abstract:
The charged-particle beam system includes a non-axisymmetric diode (2) that forms a non-axisymmetric beam (8) having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.
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Inventors:
Bat ronak jay
Chain pin
Elephant gin
Chain pin
Elephant gin
Application Number:
JP2007515673A
Publication Date:
January 24, 2008
Filing Date:
June 06, 2005
Export Citation:
Assignee:
Massachusetts Institute of Technology
International Classes:
H01J37/14; G21K1/00; G21K1/093; G21K5/04; H01J3/02; H01J3/20; H01J27/02; H01J29/64; H01J37/00; H05H15/00; H01J37/141; H01J37/143
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida