Title:
超電導デバイス用の非酸化物系誘電体
Document Type and Number:
Japanese Patent JP6633754
Kind Code:
B2
Abstract:
A method of forming a superconductor device is provided. The method includes depositing a non-oxide based dielectric layer over a substrate, depositing a photoresist material layer over the non-oxide based dielectric layer, irradiating and developing the photoresist material layer to form a via pattern in the photoresist material layer, and etching the non-oxide based dielectric layer to form openings in the non-oxide based dielectric layer based on the via pattern. The method further comprises stripping the photoresist material layer, and filling the openings in the non-oxide based dielectric with a superconducting material to form a set of superconducting contacts.
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Inventors:
Keriher, James Tee.
Di Giacomo, Sandro Jay.
Shaman, Collie Yi.
Wagner, Brian Pee.
Di Giacomo, Sandro Jay.
Shaman, Collie Yi.
Wagner, Brian Pee.
Application Number:
JP2018527930A
Publication Date:
January 22, 2020
Filing Date:
October 14, 2016
Export Citation:
Assignee:
NORTHROP GRUMMAN SYSTEMS CORPORATION
International Classes:
H01L39/24; C01B32/956; H01B12/06; H01L21/768; H01L23/532
Domestic Patent References:
| JP2012519379A | ||||
| JP2015511067A | ||||
| JP64064274A | ||||
| JP2005039244A | ||||
| JP2002522923A |
Foreign References:
| WO2003079429A1 | ||||
| US20150179914 | ||||
| US6482656 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda