Title:
非平面のCVDダイヤモンド被覆CMPパッドコンディショナーおよびその製造方法
Document Type and Number:
Japanese Patent JP2011514848
Kind Code:
A
Abstract:
The present invention relates to a composite material having non-planar geometries and edge-shaving surfaces comprising a CVD diamond coating applied to a composite substrate made from a ceramic material and a preferably unreacted carbide-forming material of various configurations and for a variety of applications.
Inventors:
David E. Sluts
Application Number:
JP2010550785A
Publication Date:
May 12, 2011
Filing Date:
March 06, 2009
Export Citation:
Assignee:
Morgan Advanced Ceramics, Incorporated
International Classes:
B24B53/12; B24B37/00; B24D3/00; H01L21/304
Domestic Patent References:
| JPH1071559A | 1998-03-17 | |||
| JPH06182669A | 1994-07-05 | |||
| JPS62226889A | 1987-10-05 | |||
| JP2003103464A | 2003-04-08 | |||
| JP2003511255A | 2003-03-25 | |||
| JP2001510738A | 2001-08-07 |
Attorney, Agent or Firm:
Kijuro Kawakita