Title:
非再生型イオン交換樹脂の洗浄装置及び超純水製造システム
Document Type and Number:
Japanese Patent JP6722552
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a washing machine of a non-regeneration type ion exchange rein capable of increasing water quality in short time and reducing drainage volume without adjusting (reducing) production amount of ultrapure water, and an ultrapure water production system using the same.SOLUTION: There is provided a washing device 19 for washing non-regeneration type ion exchange resins 16A to 16C of an ultrapure water production system, a washing device for non-regeneration type ion exchange resins 10 has a pure water tank for washing 19A for storing pure water for washing for washing the non-regeneration type ion exchange resins 16A to 16C, an ultraviolet irradiation means for washing 19B capable of irradiating ultraviolet to the pure water after washing after washing the non-regeneration type ion exchange resins with the pure water for washing, and a decomposition product removal means 19C capable of removing decomposition products generated by ultraviolet irradiation means for washing when passing the pure water after washing to which the ultraviolet is irradiated.SELECTED DRAWING: Figure 2
Inventors:
Seiichi Nakamura
Application Number:
JP2016172999A
Publication Date:
July 15, 2020
Filing Date:
September 05, 2016
Export Citation:
Assignee:
Nomura Micro Science Co., Ltd.
International Classes:
C02F1/42; B01J49/60; C02F1/32; C02F1/58
Domestic Patent References:
| JP2004122020A | ||||
| JP6015264A | ||||
| JP6238271A | ||||
| JP2006192354A | ||||
| JP2013108916A | ||||
| JP2004261768A |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office