NON-VOLATILE RESIDUE CONCENTRATION MONITORING DEVICE FOR SAMPLE LIQUID AND CONCENTRATION MEASURING METHOD

Title:

NON-VOLATILE RESIDUE CONCENTRATION MONITORING DEVICE FOR SAMPLE LIQUID AND CONCENTRATION MEASURING METHOD

Document Type and Number:

Japanese Patent JP3280464

Kind Code:

B2

Abstract:

PURPOSE: To monitor a super-pure water contamination level by, relating to the manufacture of a semiconductor device, inspecting a trace amount of solvent, and measuring its residue concentration quickly with precision.
CONSTITUTION: A pump 18 delivers such carrier liquid as super-pure water, etc., continuously at a constant flow rate to a non-volatile residue monitoring device 24 through a T-shape pipe coupler 22. An injector 54 injects a solvent intermittently into the carrier liquid in the coupling pipe 22. The flow rate of the solvent is substantially smaller than that of the carrier liquid. The solvent is, for example, injected at a constant flow rate for a few minutes, to generate turbulence at a mixing value 58 in the lower stream of the pipe coupler 22, to be thoroughly mixed with the carrier liquid. Or, a small capacity injector burst-injects the solvent instantaneously, to cause laminar flow instead of turbulence, and the plug of solvent is made to flow, together with the carrier liquid, in a liquid flow, while separated from it. In both cases, a monitoring device 24 counts the number of non-volatile residue particles in the solvent with a condensed particle counter 44, etc., and a microprocessor 48 derives a residue concentration value from the count.

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Inventors:

David B. Blackford
Thomas A. Kerick
David S. Enser
Elizabeth A. Hill

Application Number:

JP10454193A

Publication Date:

May 13, 2002

Filing Date:

April 30, 1993

Export Citation:

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Assignee:

TSI INCORPORATED

International Classes:

G01N15/06; G01N15/10; G01N15/14; (IPC1-7): G01N15/06; G01N15/10; G01N15/14

Domestic Patent References:

JP6102167A
JP6271831A
JP6454254A
JP62222145A
JP61134668A
JP60142262A
JP63501448A

Attorney, Agent or Firm:

Akira Asamura (2 outside)

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