Title:
不揮発性記憶装置およびその製造方法
Document Type and Number:
Japanese Patent JP6489480
Kind Code:
B2
Abstract:
A nonvolatile storage device includes a first conductive layer disposed on a substrate, a contact plug including a conductive material and disposed on the first conductive layer, a variable resistance element covering the upper surface of the contact plug, resistance of the variable resistance element changing in accordance with an voltage applied to the variable resistance element, one single insulating layer that is directly or indirectly in contact with a sidewall of the contact plug and that is directly or indirectly in contact with a sidewall of the variable resistance element, and a second conductive layer disposed on the variable resistance element.
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Inventors:
Hideaki Murase
Yoshio Kawashima
Yoshio Kawashima
Application Number:
JP2015107474A
Publication Date:
March 27, 2019
Filing Date:
May 27, 2015
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01L21/8239; H01L27/105; H01L45/00; H01L49/00
Domestic Patent References:
| JP2008235863A | ||||
| JP2009117668A |
Foreign References:
| WO2012073503A1 |
Attorney, Agent or Firm:
Patent business corporation Yuko patent office