Title:
NONNCRYSTAL SEMICONDUCTOR MASTER MANUFACTURING PROCESS
Document Type and Number:
Japanese Patent JPS5219972
Kind Code:
A
Abstract:
PURPOSE:To provide a manufacturing process of a master which prevents relief patterns to drop of the base in the case of molding reproduction using noncrystal semiconductors.
Inventors:
SAKAI CHIAKI
UTSUKI YASUSHI
UTSUKI YASUSHI
Application Number:
JP9595175A
Publication Date:
February 15, 1977
Filing Date:
August 08, 1975
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G03F1/00; G03F1/54; H01L21/027; H01L21/302; (IPC1-7): H01L21/302
Domestic Patent References:
| JPS4924367A | 1974-03-04 |