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Patent Searching and Data


Title:
NONVOLATILE SEMICONDUCTOR MEMORY AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH03108771
Kind Code:
A
Abstract:

PURPOSE: To perform miniaturization, integration of a memory cell and to electrically erase data in the operation by providing first, second diffused layers formed in a semiconductor substrate, specific first gate electrode, second insulating film, second gate electrode and third gate electrode.

CONSTITUTION: First, second diffused layers 2, 3 formed in a first conductivity type semiconductor substrate 1, a first gate electrode 6 formed on part of a channel region 4 existing between the layers 2 and 3 and on the layer 2 through an insulating film 5, second insulating films 8a, 8b formed at both sides of the electrode 6 and formed by extending to the substrate 1, a second gate electrode 9a formed on a channel region 4 and on the film 8a existing on one side of the electrode 6, and a third gate electrode 9b formed on the layer 2 and on the film 8b existing on the other side of the electrode 6 are provided.


Inventors:
YAMADA SEIJI
Application Number:
JP24529589A
Publication Date:
May 08, 1991
Filing Date:
September 22, 1989
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/8247; H01L29/788; H01L29/792; (IPC1-7): H01L29/788; H01L29/792
Attorney, Agent or Firm:
Takehiko Suzue (3 outside)